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Integrated position sensing for 2D microscanning mirrors using the SOI-device layer as the piezoresistive mechanical-elastic transformer

: Grahmann, J.; Conrad, H.; Sandner, T.; Klose, T.; Schenk, H.


Dickensheets, D.L. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MOEMS and miniaturized systems VIII : 27 - 28 January 2009, San Jose, California, USA
Bellingham, WA: SPIE, 2009 (SPIE Proceedings Series 7208)
ISBN: 978-0-8194-7454-4
ISSN: 0277-786X
Paper 720808
Conference "MOEMS and Miniaturized Systems" <8, 2009, San Jose/Calif.>
Conference Paper
Fraunhofer IPMS ()
MOEMS; scanning micromirror; piezoresistive; position sensor; angular sensor

Position feedback of resonant scanning micromirrors plays a key role for various applications like portable laser projection displays or scanning grating spectrometers. The SOI device layer without an additional surface implantation is used for the piezoresistive sensor design. It assures the full compatibility to microscanner technology and requires no additional technological efforts. The necessary asymmetry of the current field density is achieved by the geometrical design of the sensor and its contacting. Integrated 2D position sensors with amplitude sensitivities of 0.42mV/V° were fabricated. FEA simulation and measured data correlates well with variations of <= 20.4%.