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Modeling of contact behavior between polishing pad and workpiece surface

 
: Klocke, F.; Dambon, O.; Zunke, R.

:

Production Engineering. Research and development 2 (2008), No.1, pp.9-14
ISSN: 0944-6524
ISSN: 1863-7353
English
Journal Article
Fraunhofer IPT ()

: http://publica.fraunhofer.de/documents/N-94054.html