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Comparison of laser chemical processing and LaserMicroJet for structuring and cutting silicon substrates

: Hopman, S.; Fell, A.; Mayer, K.; Mesec, M.; Rodofili, A.; Kray, D.


Applied physics. A 95 (2009), No.3, pp.857-866
ISSN: 0340-3793
ISSN: 0721-7250
ISSN: 0947-8396 (Print)
ISSN: 1432-0630 (Online)
Journal Article
Fraunhofer ISE ()

This paper deals with the development of a new cutting method for thin silicon solar wafers with liquid-jet-guided lasers (LaserMicroJetA (R), LMJ, and Laser Chemical Processing, LCP). Several laser systems with different wavelengths were tested to find the optimum laser system and processing parameters in terms of efficient material removal and deep laser cutting. Water and potassium hydroxide were used as carrier liquids to enhance laser ablation. The ablation efficiency was defined as a target parameter and experimentally determined by performing single laser grooves. It is demonstrated that the ablation process of LMJ is mainly affected by silicon melting and then removing by the liquid-jet momentum for single laser grooves. Best result for deep laser grooves is achieved if evaporation dominates the ablation process. Better surface quality referred to laser-induced crystalline damage is presented for a cut wafer with LMJ in comparison to a standard multiwire slurry saw. This shows a great potential of wafering with liquid-jet-guided lasers although no optimal liquid media was used.