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Smatiehs - Smart inspection system for high speed and multifunctional testing of Mems an Moems
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2008
Conference Paper
Titel
Smatiehs - Smart inspection system for high speed and multifunctional testing of Mems an Moems
Author(s)
Gastinger, K.
Kujawinska, M.
Lovhaugen, O.
Beer, S.
Gorecki, C.
Zeitner, U.D.
Hauptwerk
Technical digest of the Fourteenth Microoptics Conference
Konferenz
Microoptics Conference (MOC) 2008
Language
English
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Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF