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Smatiehs - Smart inspection system for high speed and multifunctional testing of Mems an Moems

 
: Gastinger, K.; Kujawinska, M.; Lovhaugen, O.; Beer, S.; Gorecki, C.; Zeitner, U.D.

Thienpont, H. ; Japan Society of Applied Physics -JSAP-:
Technical digest of the Fourteenth Microoptics Conference : September 25 - 27, 2008, Diamant Conference and Business Centre, Brussels - Belgium
Tokyo: The Microoptics Group, 2008
pp.194-195
Microoptics Conference (MOC) <14, 2008, Brussels>
English
Conference Paper
Fraunhofer IOF ()

: http://publica.fraunhofer.de/documents/N-93740.html