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Thin-film measurements with THz-radiation

: Ellrich, F.; Theuer, M.; Torosyan, G.; Jonuscheit, J.; Beigang, R.


Institute of Electrical and Electronics Engineers -IEEE-; IEEE Microwave Theory and Techniques Society:
33rd International Conference on Infrared, Millimeter and Terahertz Waves, IRMMW-THz 2008. Vol.2 : 16th International Conference on Terahertz Electronics; 15.-19.9.2008 Pasadena, California, USA
New York, NY: IEEE, 2008
ISBN: 978-1-4244-2120-6
ISBN: 978-1-4244-2119-0
International Conference on Infrared, Millimeter and Terahertz Waves (IRMMW-THz) <33, 2008, Pasadena/Calif.>
International Conference on Terahertz Electronics <16, 2008, Pasadena/Calif.>
Conference Paper
Fraunhofer IPM ()

The potential of short terahertz pulses for thin-film measurements of materials opaque in the visible range is demonstrated. Layer thicknesses down to 10 mu m have been determined in transmission as well as in reflection measuring mode and complex multilayer structures in the sub-wavelength range have been resolved with this technique.