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Roll-to-roll technology for transparent high barrier films

: Schiller, N.; Fahlteich, J.; Fahland, M.; Schönberger, W.

Vacuum technology & coating (2009), February, pp.46-49
Journal Article
Fraunhofer FEP ()
Barrier Film; solar cell

Solar Cells and organic electronic devices require an encapsulation to ensure sufficient life time. Key parameters of encapsulation films are water vapor and oxygen permeation barrier, UV stability, temperature stability, optical transmission spectra and mechanical stability. Several work groups suggest multilayer stacks to meet the barrier requirements. Besides these technical parameters, an important parameter is production cost. To meet the cost requirements, roll-to-roll coating is a must for deposition of barrier films onto flexible materials.
To address the need for roll-to-roll deposition of transparent high barrier coatings, we have developed a concept to deposit multilayer stacks by an in-line combination of reactive pulsed sputtering and a novel magnetron based PECVDprocess.