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Fabrication of silicon aperture probes for scanning near-field optical microscopy by focused Ion beam nano machining
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2001
Journal Article
Titel
Fabrication of silicon aperture probes for scanning near-field optical microscopy by focused Ion beam nano machining
Author(s)
Lehrer, C.
Frey, L.
Petersen, S.
Sulzbach, T.
Ohlsson, O.
Dziomba, T.
Danzebrink, H.U.
Ryssel, H.
Zeitschrift
Microelectronic engineering
DOI
10.1016/S0167-9317(01)00463-4
Language
English
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