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Procedure to characterize microroughness of optical thin films: Application to ion-beam-sputtered vacuum-ultraviolet coatings

: Ferre-Borrull, J.; Duparre, A.; Quesnel, E.


Applied optics 40 (2001), No.13, pp.2190-2198
ISSN: 0003-6935
ISSN: 1539-4522
ISSN: 1559-128X
Journal Article
Fraunhofer IOF ()
microroughness; optical thin films

Measurements over different spatial-frequency ranges are composed into a single power spectral density (PSD) covering a large bandwidth. This is followed by the extraction of characteristic parameters through fitting of the PSI) to a suitable combination of theoretical models. The method allows combine microroughness measurements performed with different techniques, and the fitting procedure can be adapted to any behavior of a combined PSI). - The method has been applied to a set of ion-b sputtered fluoride vacuum-LTV coatings with increasing number of alternative low- and high-index la. Conclusions about roughness development and microstructural growth are drawn.