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Custom-specific UV nanoimprint templates and life-time of antisticking layers

Poster at MNE 2007, 33rd International Conference on Micro and Nano-Engineering, Copenhagen, Denmark
Kundenspezifische UV-Nanoimprint-Prägeformen und Lebensdauer von Antihaftschichten
 
: Schmitt, H.; Zeidler, M.; Rommel, M.; Bauer, A.J.; Ryssel, H.

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Fulltext urn:nbn:de:0011-n-874054 (702 KByte PDF)
MD5 Fingerprint: 825bc9808317bafce5cf2563bc69ed4c
Created on: 23.1.2009


2007, 1 Folie
International Conference on Micro- and Nano-Engineering (MNE) <33, 2007, Copenhagen>
English
Poster, Electronic Publication
Fraunhofer IISB ()
UV nanoimprint lithography; quartz template; life-time of antisticking layer; UV curing material

: http://publica.fraunhofer.de/documents/N-87405.html