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Suitability of sputtered titanium dioxide layers for low-temperature measurement of oxygen concentration

 
: Biehl, S.; Goericke, F.; Wolf, L.; Staufenbiel, S.; Delan, A.; Schultheiß, E.

Eurosensors XXII. Proceedings. CD-ROM : Dresden, Germany, 7 - 10 September 2008
Dresden, 2008
ISBN: 978-3-00-025217-4
pp.1590-1599
Eurosensors <22, 2008, Dresden>
English
Conference Paper
Fraunhofer IST ()
Fraunhofer FEP ()
titanium dioxide; low temperature gas detection; oxygen sensing

Abstract
In this work, we report on the suitability of three different sputtered titanium dioxide layers for oxygen detection at low temperatures. It was found that TiO2 -layers deposited by mid-frequency reactive magnetron sputtering were suitable for oxygen sensing at working temperatures as low as 200 °C. The deposition parameters have a big impact on the minimum working temperature and sensitivities of the sensors.

: http://publica.fraunhofer.de/documents/N-85947.html