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Fabrication of ridge waveguides in zinc-substituted lithium niobate by means of ion-beam enhanced etching

: Hartung, H.; Kley, E.-B.; Tünnermann, A.; Gischkat, G.; Schrempel, F.; Wesch, W.


Optics Letters 33 (2008), No.20, pp.2320-2322
ISSN: 0146-9592
Journal Article
Fraunhofer IOF ()
LiNbO3; generation; crystal

We present results on the fabrication and characterization of ridge waveguides in zinc-substituted lithium niobate. High-quality waveguides were fabricated by a combination of liquid-phase epitaxy and multiple applications of ion-beam enhanced etching. The two major demands on ridge waveguides, a very low side-wall roughness and a rectangle shape with side-wall angles close to 90°, were realized simultaneously by using this technique. Single-mode waveguiding at a wavelength of 1064 nm was demonstrated with attenuation values of 0.9 dB/cm.