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  4. Efficient planar-integrated free-space optical interconnects fabricated by a combination of binary and analog lithography
 
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2008
Journal Article
Title

Efficient planar-integrated free-space optical interconnects fabricated by a combination of binary and analog lithography

Abstract
Design, fabrication, and experimental testing of an integrated microoptical module for interconnection are reported. The systems integration is based on the concept of planar-integrated free-space optics. The module combines diffractive-reflective and refractive microoptics. The diffractive elements were fabricated by binary lithography and reactive ion etching. The refractive elements were made by analog lithography using a high-energy beam sensitive mask and replication in Ormocer. The fabricated module implemented a simple one-dimensional optical interconnect. Two versions were implemented for which insertion losses of approximately 8 and 4.5 dB were measured, respectively.
Author(s)
Heming, R.
Wittig, L.-C.
Dannberg, P.
Jahns, J.
Kley, E.B.
Gruber, M.
Journal
Journal of Lightwave Technology  
DOI
10.1109/JLT.2008.919456
Language
English
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
Keyword(s)
  • analog lithography

  • microoptic

  • optical interconnect

  • planar integration

  • replication

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