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Simulation of larger mask areas using the waveguide method with fast decomposition technique

: Evanschitzky, P.; Shao, F.; Erdmann, A.; Reibold, D.


Naber, R.J. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.; BACUS International:
Photomask Technology 2007. Pt.1 : 18 - 21 September 2007, Monterey, California, USA; papers from the SPIE Conference on Photomask Technology held as part of the 27th International Symposium on Photomask Technology
Bellingham, WA: SPIE, 2007 (SPIE Proceedings Series 6730)
ISBN: 978-0-8194-6887-1
Paper 67301P
Symposium on Photomask Technology <2007, Monterey/Calif.>
International Symposium on Photomask Technology <27, 2007, Monterey/Calif.>
Conference Paper
Fraunhofer IISB ()