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Mikrooptische Elemente, Funktionen und lithographische Herstellungstechnologien
Micro-optical elements, functions and lithographic fabrication technologies
Today's high-technology applications integrate an increasing number of different functions and at the same time the system size decreases rapidly. Besides others, optical technologies, especially micro-optics, play a key role in this framework. A number of different technologies exist for the realization of the required highly innovative micro-optical components. The present article gives an overview of the origination of micro-optical surface profiles by lithographic techniques and related technologies. The flexibility of the different fabrication approaches is demonstrated by examples, to be applied for the realization of the huge variety of micro-optical elements like microlenses, refractive beam shapers, computer-generated holograms, photonic crystals and artificial refractive index structures.