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Accurate parameter extraction for the simulation of direct structuring by ion beams

Poster at MNE 2006, 32nd International Conference on Micro- and Nano- Engineering 2006, Barcelona, Spain
 
: Beuer, S.; Rommel, M.; Lehrer, C.; Platzgummer, E.; Kvasnica, S.; Bauer, A.J.; Ryssel, H.

:
Fulltext urn:nbn:de:0011-n-832124 (1.3 MByte PDF)
MD5 Fingerprint: 457937dc6a7ea40a27447b87a55f5c88
Created on: 5.11.2008


2006, 1 Folie
International Conference on Micro- and Nano-Engineering (MNE) <32, 2006, Barcelona>
English
Poster, Electronic Publication
Fraunhofer IISB ()
profile; ion beam; simulation; sputtering; surface erosion

: http://publica.fraunhofer.de/documents/N-83212.html