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Studies on diamond-like carbon coatings for the application in micro actuators

: Paulkowski, D.; Bandorf, R.; Achilles, S.; Pape, F.; Gatzen, H.H.; Bräuer, G.


Advanced engineering materials 10 (2008), No.7, pp.644-647
ISSN: 1438-1656
ISSN: 1615-7508
Journal Article
Fraunhofer IST ()

Minimizing wear and friction in the contact area of the sliding parts of Micro-Electro- Mechanical System (MEMS) components is of utmost importance for the functionally and reliability. Diamond-like carbon (DLC) coatings were deposited on samples made of materials commonly used in active MEMS devices.