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Special issue of the high-aspect-ratio micro-structure technology workshop, HARMST'07. Editorial

Besancon, France, 7-9 June 2007
 
: Malek, C.K.; Saile, V.; Michel, B.

:

Malek, C.K.:
High Aspect Ratio Micro Structure Technology Workshop 2007. Special issue : Besançon, France, 7 - 9 June 2007: HARMST'07 is the 7th in the series
Berlin: Springer, 2008 (Microsystem technologies 14.2008, Nr.9-11)
ISSN: 0946-7076
pp.1215-1216
High Aspect Ratio Micro Structure Technology Workshop (HARMST) <7, 2007, Besancon>
English
Conference Paper, Journal Article
Fraunhofer IZM ()

: http://publica.fraunhofer.de/documents/N-82021.html