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Title
Anordnung und Verfahren zur Entfernung von Verunreinigungen oder Modifizierung von Oberflaechen von Substraten mittels elektrischer Bogenentladung
Date Issued
2006
Author(s)
Zimmer, O.
Kaulfuss, F.
Patent No
102006062375
Abstract
(A1) Die Erfindung betrifft eine Anordnung sowie ein Verfahren zur Entfernung von Verunreinigungen oder Modifizierung von Oberflaechen von Substraten mittels elektrischer Bogenentladung. Aufgabe der Erfindung ist es, Moeglichkeiten zu schaffen, mit der in einfacher und kostenguenstiger Form Verunreinigungen von Substratflaechen entfernt oder solche Oberflaechen modifiziert werden koennen, ohne dass es zu einer ungleichmaessigen Entfernung von Verunreinigungen oder Oberflaechenmodifizierung ueber die Substratoberflaeche kommt. Erfindungsgemaess ist dabei an der Anode, die in Abstand zu einem als Kathode geschalteten Substrat angeordnet ist, ein im Inneren hohles Gehaeuseelement elektrisch isoliert befestigt. Mit dem Gehaeuseelement ist ein Bearbeitungsraum fuer die elektrische Bogenentladung ausgebildet. Die Oberflaeche des Substrats und Anode mit Gehaeuseelement sind relativ zueinander bewegbar und die Oberflaeche des Substrats ist groesser als die wirksame Flaeche der Anode.
WO 2008074312 A2 UPAB: 20080729 NOVELTY - The arrangement for the removal of contaminants or modification of surfaces of substrates by an electric arc discharge, comprises an internally hollow, transparent housing element (5) fixed in an electrically insulating manner on an anode (2), which is arranged at a distance from a substrate (1) connected as cathode, and a device for monitoring the reached condition of the surface of the substrate. The housing element forms a processing space for the electric arc discharge. The surface of the substrate and anode with the housing element is moved relative to one another. DETAILED DESCRIPTION - The arrangement for the removal of contaminants or modification of surfaces of substrates by an electric arc discharge, comprises an internally hollow, transparent housing element (5) fixed in an electrically insulating manner on an anode (2), which is arranged at a distance from a substrate (1) connected as cathode, and a device for monitoring the reached condition of the surface of the substrate. The housing element forms a processing space for the electric arc discharge. The surface of the substrate and anode with the housing element is moved relative to one another and the surface of the substrate is larger than the active area of the anode. The arc discharges are initiated between the surface of the substrate and the anode. An opening is held between the front surface of the housing element and substrate surface. The front surface faces toward the surface the substrate. The housing element is cylindrically formed with square or rectangular cross section. The housing element is formed from a non-ferrous magnetic material, a dielectric material or a ceramic material. The anode extends in a row arrangement perpendicularly to a feed direction over the entire width of the substrate surface. The housing element is formed with two plates aligned at a distance to each other and perpendicular to the feed direction, and with two elements. Apertures and slots are formed at the housing element. A mechanical cleaning mechanism is present at the anode, which is formed as a rotating cylinder around an axis. The cleaning device is an element formed as brush. The cleaning mechanism and the anodes are arranged laterally or vertically underneath the substrate. The anodes are cooled and are formed with graphite or a graded-index material. The heat conductivity is increased at the anode side turned away the substrate. A pressure (less than 1000 Pa) is kept in the operation chamber. An INDEPENDENT CLAIM is included for the removal of contaminants or modification of surfaces of substrates. USE - Arrangement for the removal of contaminants or modification of surfaces of substrates by an electric arc discharge (claimed). ADVANTAGE - The arrangement has a simple and cost-effective form, and effectively removes the contaminants from substrate areas or modifies such surfaces without a non-uniform removal of contaminants or surface modification occurring over the substrate surface.
Language
de
Patenprio
DE 102006062375 A: 20061219