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Mechanical stress and thermal-elastic properties of oxide coatings for use in the DUV spectral region

: Thielsch, R.; Gatto, A.; Kaiser, N.

Optical Society of America -OSA-, Washington/D.C.:
Optical Interference Coatings : July 15-20 2001 Banff, Alberta, Canada
Washington, DC: OSA, 2001 (OSA Technical digest series)
ISBN: 1-55752-682-6
Topical Meeting on Optical Interference Coatings <8, 2001, Banff/Alberta>
Conference Paper
Fraunhofer IOF ()
thin film; optical properties

Mechanical stress, and the structure of single oxide layers SiO2, Al2O3, HfO2 and of high reflection multi-layer coatings deposited by reactive evaporation, plasma ion assisted deposition and ion beam sputtering are studied. The measured stress is related to the microstructure and the water incorporation by means of infrared spectroscopy. From the slopes of measured stress - temperature curves of these coatings deposited onto two different substrate materials (silicon, fused silica) the bi-axial modulus and the thermal expansion coefficients of the films are estimated.