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High-reflectivity dense UV mirrors

: Torchio, P.; Gatto, A.; Alvisi, M.; Albrand, G.; Kaiser, N.; Amra, C.

Optical Society of America -OSA-, Washington/D.C.:
Optical Interference Coatings : July 15-20 2001 Banff, Alberta, Canada
Washington, DC: OSA, 2001 (OSA Technical digest series)
ISBN: 1-55752-682-6
Topical Meeting on Optical Interference Coatings <8, 2001, Banff/Alberta>
Conference Paper
Fraunhofer IOF ()
thin film; coating; deposition; fabrication; materials characterization; process characterization; optical properties

High-reflectivity dense mutlilayer coatings are produced by Ion Plating and Plasma Ion Assisted Deposition technologies. Optical and non optical properties of single layers and UV mirrors down to 250 nm are reported.