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Calculation and measurement of the time dependent erosion rate of electromagnetic steered rectangular arc cathodes

: Zimmer, O.; Vetter, J.; Rackwitz, N.; Siemroth, P.


Surface and coatings technology 146-147 (2001), No.09/10, pp.195-200
ISSN: 0257-8972
Journal Article
Fraunhofer IWS ()
PVD; Bogentechnologie; Nanotechnologie; Plasma-Diagnostik

ProArc is a system for programmable electromagnetic controlling of the arc spot motion on large area flat cathodes in devices for vacuum arc evaporation. Using this system allows one to adjust predefined erosion and deposition profiles and to increase the lifetime of the cathodes. Arc spot traces and erosion profiles have been simulated for various run-modes. The simulation enables an estimation of the local erosion rate dependence on both time and magnetic field strength. The computer program used contains a model for the arc spot behavior under the influence of external magnetic fields. These calculations were compared with measured erosion profiles.