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Review of fundamentals of thin film growth

Grundlagen des Wachstums dünner Schichten
: Kaiser, N.

Optical Society of America -OSA-, Washington/D.C.:
Optical Interference Coatings : July 15-20 2001 Banff, Alberta, Canada
Washington, DC: OSA, 2001 (OSA Technical digest series)
ISBN: 1-55752-682-6
Topical Meeting on Optical Interference Coatings <8, 2001, Banff/Alberta>
Conference Paper
Fraunhofer IOF ()
optical coating; interference coating; thin films for optics; dielectric

With the aim to engineer optical properties, thin film formation is reviewed as a process starting with nucleation followed by coalescence and subsequent thickness growth, all stages of which can be influenced by deposition parameters.