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Investigation of high-resolution contact printing

 
: Meliorisz, B.; Partel, S.; Schnattinger, T.; Fühner, T.; Erdmann, A.; Hudek, P.

:

Kristensen, A.:
33rd International Conference on Micro- and Nano-Engineering 2007. Proceedings : 23-26 September 2007, Copenhagen, Denmark
Amsterdam: Elsevier, 2008 (Microelectronic engineering 85.2008, Nr.5-6)
pp.744-748
International Conference on Micro- and Nano-Engineering (MNE) <33, 2007, Copenhagen>
English
Conference Paper, Journal Article
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-76850.html