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In situ optical characterization and reengineering of interference coatings

: Wilbrandt, S.; Stenzel, O.; Kaiser, N.; Trubetskov, M.K.; Tikhonravov, A.V.


Applied optics 47 (2008), No.13, pp.C49-C54
ISSN: 0003-6935
ISSN: 1539-4522
ISSN: 1559-128X
Journal Article
Fraunhofer IOF ()

A new optical monitoring system has been developed that allows recording of transmission spectra in the wavelength range between 400 and 920 nm of a growing optical coating during deposition. Several kinds of thin film sample have been prepared by use of a hybrid monitoring strategy that is essentially based on a combination of quartz monitoring and in situ transmission spectra measurements. We demonstrate and discuss the applicability of our system for reengineering procedures of high-low stacks and measurements of small vacuum or thermal shifts of optical coatings.