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Stiffening and hydrophilisation of SOG low-k material studied by ellipsometric porosimetry, UV ellipsometry and laser-induced surface acoustic waves
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2008
Journal Article
Titel
Stiffening and hydrophilisation of SOG low-k material studied by ellipsometric porosimetry, UV ellipsometry and laser-induced surface acoustic waves
Author(s)
Urbanowicz, A.M.
Meshman, B.
Schneider, D.
Baklanov, M.R.
Zeitschrift
Physica status solidi. A
DOI
10.1002/pssa.200777749
Language
English
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Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS