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Stiffening and hydrophilisation of SOG low-k material studied by ellipsometric porosimetry, UV ellipsometry and laser-induced surface acoustic waves

 
: Urbanowicz, A.M.; Meshman, B.; Schneider, D.; Baklanov, M.R.

:

Physica status solidi. A 205 (2008), No.4, pp.829-832
ISSN: 0031-8965
ISSN: 1862-6300
ISSN: 1521-396X
ISSN: 1862-6319
English
Journal Article
Fraunhofer IWS ()

: http://publica.fraunhofer.de/documents/N-75327.html