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Modellierung optischer Messprozesse

Untersuchung der Interferenzmikroskopie mittels Simulationen
Modelling of optical measurement methods. Analysis of interference microscopy via simulations
: Schmitt, R.; Koerfer, F.; Bichmann, S.


Technisches Messen : TM 75 (2008), No.4, pp.230-236
ISSN: 0340-837X
ISSN: 0171-8096 (Print)
ISSN: 2196-7113 (Online)
Journal Article
Fraunhofer IPT ()

This paper presents the findings of the project "virtual interference microscope". A simulation environment for optical measurement systems, especially for interference microscopes based on white-light interferometry, was designed at the Fraunhofer IPT. A raytracing module is basis for these simulations. This module maps the physical and optical path lengths. With this simulation environment the effects of external influences on the measurement result can by analyzed.