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Recent progress in CMOS integrated MEMS AO mirror development

 
: Gehner, A.; Schmidt, J.U.; Wildenhain, M.; Knobbe, J.; Wagner, M.

Dainty, C.:
Adaptive optics for industry and medicine : Proceedings of the 6th International Workshop, National University of Ireland, Ireland, 12 - 15 June 2007
London: Imperial College Press, 2008
ISBN: 1-8481-6110-7
ISBN: 978-1-8481-6110-8
pp.53-58
International Workshop on Adaptive Optics in Industry and Medicine <6, 2007, Galway>
English
Conference Paper
Fraunhofer IPMS ()

: http://publica.fraunhofer.de/documents/N-75168.html