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Sapphire-GaN-based planar integrated free-space optical system

Saphir-GaN basierte planare und integrierte optische Systeme
: Hofmann, M.; Hauguth-Frank, S.; Lebedev, V.; Ambacher, O.; Sinzinger, S.


Applied optics 47 (2008), No.16, pp.2950-2955
ISSN: 0003-6935
ISSN: 1539-4522
ISSN: 1559-128X
Journal Article
Fraunhofer IAF ()
GaN; gallium nitride; Galliumnitrid; planar optical system; planares optisches System; optical design; optisches Design; beamline; Strahlführung

We report on the design and fabrication of a planar integrated free-space optical system working on the basis of binary phase diffractive optical elements (DOEs) realized in GaN on a sapphire substrate. Group III-nitride/sapphire substrates enable the parallel monolithic integration of passive microoptical elements like lenses and gratings as demonstrated here and optoelectronic devices like light emitters and photodetectors on a single wafer. We present an approach for the simultaneous optimization of the efficiency of transmissive and reflective diffractive optical elements processed in a single lithographic etching step.