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Laser annealing of power devices

 
: Friedrich, D.; Bernt, H.; Hanssen, H.; Oesterlin, P.; Schmidt, H.

:

IEEE Electron Devices Society:
15th IEEE International Conference on Advanced Thermal Processing of Semiconductors 2007 : October 2 - 5, 2007, Catania, Italy; RTP 2007
Piscataway, NJ: IEEE, 2007
ISBN: 1-4244-1227-7
pp.263-269
International Conference on Advanced Thermal Processing of Semiconductors (RTP) <15, 2007, Catania>
English
Conference Paper
Fraunhofer ISIT ()

: http://publica.fraunhofer.de/documents/N-74861.html