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Investigation of thin oxide films on titanium for capacitor applications

: Schroth, S.; Schneider, M.; Mayer-Uhma, T.; Michaelis, A.; Klemm, V.


Papers Presented at ECASIA'07, the 12th European Conference on Applications of Surface and Interface Analysis. Special Issue : Brussels, Belgium, 9-14 September 2007
Chichester: Wiley, 2008 (Surface and interface analysis 40.2008, Nr. 3/4)
ISSN: 0142-2421
European Conference on Applications of Surface and Interface Analysis (ECASIA) <12, 2007, Brussels>
Conference Paper, Journal Article
Fraunhofer IKTS ()
titanium; thin oxide film; cyclovoltammogram; coulometry; thickness estimation; Passivierung; Titan; anodische Oxidation; Dielektrizitätskonstante; Acetat; Pufferlösung; Schichtdickenmessung; Coulometrie; Ellipsometrie; elektrochemisches Potenzial; Voltammetrie; Kristallorientierung; amorphe dünne Schicht; Transmissionselektronenmikroskopie (TEM)

Thin passive films on titanium formed by electrolytic oxidation show a high relative permittivity and could be a promising cost effective dielectric material for capacitor applications. In the present work, the films were formed in an acetate buffer solution by potentiodynamic polarisation up to various potentials. The film thickness was determined by coulometry and ellipsometry. The growth factor is 2.7 nm/V. Furthermore, by using an electrochemical micro-capillary cell the anodising process was performed at high lateral resolution on different substrate grains with various crystallographic orientations. An influence of the Ti grain orientation on the TiO2 film thickness could not be observed under the used experimental conditions. By means of transmission electron microscope(TEM) investigation the oxide film structure could be determined as prevailing amorphous.
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