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2008
Conference Paper
Titel
Method for the compensation of process-immanent form deviation in hot embossing of glass
Alternative
Methode zur Kompensation der prozessimmanenten Gestaltabweichung bei der Heißformgebung von Glas
Abstract
During the hot pressing of glass (e.g. precision glass molding, hot embossing) form deviations between the tool geometry and the manufactured glass formed part arise. Reasons for it are different thermal expansion behavior of the materials and technological parameters. The form deviation resulting from these measured variables gains more and more significance with a rising scale of miniaturization. For the hot embossing of flat glass substrates with several cavities (e.g. micro lens arrays, microfluidic components) at the Fraunhofer IWU a method was developed, in order to determine the total form deviation with the help of uncomplex shaped dies experimentally. The obtained accuracy is sufficient in order to correct ordinary optical geometries, like spherical cavities, or the pitch of V-grooves and channel structures respectively. For different tool materials and inorganic glasses according to this method correction factors were determined to compensate the process-immanent form deviation. In this way complex iteration steps in the manufacturing of the tool molds can be minimized.