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Progress in selective laser ablation of dielectric layers

: Knorz, A.; Grohe, A.; Harmel, C.; Preu, R.; Luther, J.

Fulltext urn:nbn:de:0011-n-740723 (216 KByte PDF)
MD5 Fingerprint: d3463cf8da6654ccb018924ad94dc50f
Created on: 29.9.2012

European Commission, Joint Research Centre -JRC-:
The compiled state-of-the-art of PV solar technology and deployment. 22nd European Photovoltaic Solar Energy Conference, EU PVSEC 2007. Proceedings of the international conference. CD-ROM : Held in Milan, Italy, 3 - 7 September 2007
München: WIP-Renewable Energies, 2007
ISBN: 3-936338-22-1
European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC) <22, 2007, Milano>
Conference Paper, Electronic Publication
Fraunhofer ISE ()

For reaching higher efficiencies in industrial solar cell production an alternative process to screenprinting of silver paste for the front side metallization is desirable. One possible alternative consists of laser ablation for generating the selective openings in the anti-reflection coating followed by a metallization procedure using inkâ jetting or nickel plating with a subsequent silver electroplating step. To realize this front side metallization scheme the laser ablation must be accomplished almost damage free. As already shown previously [1], this seems to be possible for the use of silicon nitride on planar surfaces. Since industrial solar cells generally feature textured surfaces for an improved light trapping, results of laser ablated solar cells with both planar and textured surfaces are compared in this paper in order to evaluate the influence of the laser induced damage on the solar cell properties.