Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Semiconductor gas sensor combined with an ASIC in hybrid technology

: Wöllenstein, J.; Rademacher, S.; Hohe, H.-P.; Ernst, R.

AMA Fachverband für Sensorik e.V., Wunstorf:
SENSOR Conference 2007. Proceedings. Vol.1 : 13th international conference, Nürnberg, Germany, 22 - 24 May 2007
Wunstorf: AMA Service, 2007
ISBN: 978-3-9810993-1-7
Sensor-Kongress <13, 2007, Nürnberg>
Conference Paper
Fraunhofer IIS ()
Fraunhofer IPM ()

Semiconductor gas sensors found their way into several applications in recent years. The development goes towards new sensor technologies and smart sensor systems. To fulfil the several requirements of the applications new concepts are needed. One main aspect is a functional connection between gas sensors and modern microelectronics. We report on a gas sensor microsystem in hybrid technology which includes a metal oxide gas sensor array, an application-specific integrated circuit (ASIC) and a microcontroller. The ASIC was manufactured by austriamicrosystems in 0,35 micron CMOS-technology. The gas sensor system was investigated under trace gas exposure (H2, CO, NO2 and NH3) and, in all cases, at least one of the semiconducting metal oxide films reacted with sufficient sensitivity to the investigated gases. The measured response provided different patterns for each of the metal oxides and is thus appropriate for evaluation by pattern recognition techniques.