Die Miniaturisierung von Komponenten und Bauteilen im Maschinenbau

Abstract
New developments in micro- and nanotechnology open new ways in miniaturization of components and parts. The paper describes the use and the potential of intelligent components which arise by embedding of mechanics, electrics, electronics and software. Key drivers are the latest developments in microelectronics and the increased efforts to integration of technical functions and elements. To verify the quality of the manufacturing processes an integration of metrology is indispensable.