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  4. Electrostatic force coupling of MEMS oscillators for spectral vibration measurements
 
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2008
Conference Paper
Title

Electrostatic force coupling of MEMS oscillators for spectral vibration measurements

Author(s)
Forke, R.
Scheibner, D.
Mehner, J.E.
Gessner, T.
Dötzel, W.
Mainwork
Eurosensors XX, the 20th European Conference on Solid-State Transducers  
Conference
Eurosensors 2006  
DOI
10.1016/j.sna.2007.04.004
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS  
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM  
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