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Electrostatic force coupling of MEMS oscillators for spectral vibration measurements
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2008
Conference Paper
Title
Electrostatic force coupling of MEMS oscillators for spectral vibration measurements
Author(s)
Forke, R.
Scheibner, D.
Mehner, J.E.
Gessner, T.
Dötzel, W.
Mainwork
Eurosensors XX, the 20th European Conference on Solid-State Transducers
Conference
Eurosensors 2006
DOI
10.1016/j.sna.2007.04.004
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM