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Title
Verfahren zum Plasmabehandeln einer Oberfläche
Date Issued
2006
Author(s)
Thomas, M.
Schlittenhardt, E.
Patent No
102006036536
Abstract
(B3) Die Erfindung betrifft ein Verfahren zum Plasmabehandeln einer Oberfläche in einem Hohlkörper (4), bei dem zunächst der Hohlkörper (4), der eine Wand aus dielektrischem Material aufweist, mit einem Prozessgas befüllt wird, wonach der Hohlkörper (4) gasdicht verschlossen und in einen Raum (5) zwischen mindestens zwei Elektroden (1, 2) eingebracht wird, wobei in diesem Raum (5) ein Außendruck von über 0,5 bar herrscht, während in einem Innenraum des Hohlkörpers (4) ein Innendruck von ebenfalls mindestens 0,5 bar herrscht, und wobei der Raum (5) zwischen den Elektroden (1, 2) mit einem Gas gefüllt ist, das bei dem Außendruck eine höhere Zuendspannung aufweist als das Prozessgas bei dem Innendruck. Schliesslich wird im Innenraum des Hohlkörpers (4) durch Anlegen einer hinreichend hohen Wechselspannung zwischen den Elektroden (1, 2) ein Plasma gezündet.
WO 2008014915 A2 UPAB: 20080226 NOVELTY - The plasma treatment of a surface of an object such as plug or a micro titre plate in a hollow body (4) for changing its surface properties, comprises filling the hollow body with a process gas, gas tightly sealing the hollow body, introducing the sealed hollow body in a space (5) between two electrodes (1, 2), and igniting plasma in an inner chamber of the hollow body by applying a sufficiently high alternating voltage between the electrodes. The hollow body has a wall from dielectric material. The plasma is produced in the interior area of the hollow body. DETAILED DESCRIPTION - The plasma treatment of a surface of an object such as plug or a micro titre plate in a hollow body (4) for changing its surface properties, comprises filling the hollow body with a process gas, gas tightly sealing the hollow body, introducing the sealed hollow body in a space (5) between two electrodes (1, 2), and igniting plasma in an inner chamber of the hollow body by applying a sufficiently high alternating voltage between the electrodes. The hollow body has a wall from dielectric material. The plasma is produced in the interior area of the hollow body. Atmospheric pressure prevails in the space while an internal pressure prevails in an inner chamber of the hollow body. The gas at the atmospheric pressure has higher ignition voltage than the process gas at the internal pressure. The internal pressure is similar to the atmospheric pressure or is less than 1 bar over the atmospheric pressure. A bag, a bottle and/or a canister are used as the hollow body. The wall thickness and diameter of the hollow body are 50 microns to 2 mm and 6 cm respectively. The plasma is produced as a volume plasma (6), which extends itself from a wall of the hollow body to opposite wall of the hollow body. The alternating voltage has amplitude of 1-20 kV. A power of 100 W to 5 kW is supplied for producing the plasma. A part of the surface to be treated is brought in contact with the plasma for 5-300 seconds. Pencil and plate, pencils and/or two plates act as electrodes, which are directly placed on the hollow body. The electrodes are moved while igniting the plasma. The process gas is added to a precursor, which encloses the process gas. The process gas is supplied before filling the hollow body through the precursor. The internal wall surface of the hollow body is coated and/or functionalized. The outside area of the object brought in the hollow body is treated before sealing the hollow body. The object is moved by shaking the hollow body while its outside area is treated with the plasma. USE - Plasma treatment of a surface of an object such as plug or micro titre plate in a hollow body (claimed) for changing its surface properties. ADVANTAGE - The procedure reduces process steps, thus ensuring simple procedure, and ensures economical treatment of the surface of abject with desired surface properties.
Language
de
Patenprio
DE 102006036536 A: 20060731