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High-performance multilayer coatings for 106 nm

: Taracheva, E.; Yulin, S.; Feigl, T.; Kaiser, N.


Khounsary, A.M. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Advances in X-ray/EUV optics and components II : 27 - 28 August 2007, San Diego, California, USA
Bellingham, WA: SPIE, 2007 (SPIE Proceedings Series 6705)
ISBN: 978-0-8194-6853-6
Paper 67050Y
Conference "Advances in X-Ray/EUV Optics and Components" <2007, San Diego/Calif.>
Conference Paper
Fraunhofer IOF ()

High-reflective multilayer coatings were designed at the wavelength of 106 nm and deposited by different deposition technologies (magnetron sputtering, thermal and e-beam evaporations). Various capping layers were suggested to protect Al/LiF coatings against the surface degradation.
The microstructure and the surface morphology of all coatings were studied by Small Angle X-ray Reflectometry (SAXR) and Atomic Force Microscopy (AFM) methods. The optical properties were characterized in the Vacuum Ultraviolet (VUV) spectral range by VUV-reflectometry. Finally, the aging stability of coatings was studied.