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2007
Conference Paper
Titel
High-performance multilayer coatings for 106 nm
Abstract
High-reflective multilayer coatings were designed at the wavelength of 106 nm and deposited by different deposition technologies (magnetron sputtering, thermal and e-beam evaporations). Various capping layers were suggested to protect Al/LiF coatings against the surface degradation. The microstructure and the surface morphology of all coatings were studied by Small Angle X-ray Reflectometry (SAXR) and Atomic Force Microscopy (AFM) methods. The optical properties were characterized in the Vacuum Ultraviolet (VUV) spectral range by VUV-reflectometry. Finally, the aging stability of coatings was studied.