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Design, test, integration and packaging of MEMS/MOEMS, 2006

Editorial
 
: Michel, B.; Courtois, B.

:

Michel, B.:
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2006. Special issue : Stresa-Italy, 26 - 28 April 2006
Berlin: Springer, 2007 (Microsystem technologies 13.2007, Nr.11/12)
pp.1449
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS <2006, Stresa>
English
Conference Paper
Fraunhofer IZM ()

: http://publica.fraunhofer.de/documents/N-70244.html