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LTCC-based sensors for mechanical quantities

: Partsch, U.; Gebhardt, S.; Arndt, D.; Georgi, H.; Neubert, H.; Fleischer, D.; Gruchow, M.

International Microelectronics and Packaging Society -IMAPS-:
EMPC 2007, the 16th European Microelectronics and Packaging Conference & Exhibition. Proceedings. Pt. 2 : June 17 - 20, 2007, Oulu, Finland
Oulu, 2007
ISBN: 978-952-997511-2
European Microelectronics and Packaging Conference and Exhibition (EMPC) <16, 2007, Oulu>
Conference Paper
Fraunhofer IKTS ()
Drucksensor; Beschleunigungssensor; keramisches Substrat; Dickschichttechnik; Mehrschichtschaltung; Temperaturstabilität; mechanische Eigenschaft; Schichtwiderstand; Dickschichtpaste

LTCC (Low Temperature Co fired Ceramic) is a ceramic multilayer technology for the manufacturing of highly integrated, reliable, high frequency suited, high temperature stable 3-D electronic packages. The LTCC-technology is commonly used for packages for mobile communication, automotive, airborne/space or medical applications. Because of its multilayer structure LTCC is also an suitable technology for the fabrication of 3-D components of ceramic based microsystems such as sensors for mechanical quantities. The paper describes the development of sensors for the detection of pressure and acceleration. The required materials for the screen printing of the sensor layers were selected (piezoresistive pastes) or developed (piezoelectric paste). Before manufacturing different simulations (FEA) were done to calculate and optimize sensor characteristics. A manufacturing technologyfor the sensors was developed, the sensor behaviour was measured.
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