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In situ layer thickness measurement in OLED and sputter processes
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2007
Conference Paper
Titel
In situ layer thickness measurement in OLED and sputter processes
Author(s)
Uredat, S.
Trepk, T.
Eritt, M.
May, C.
Toerker, M.
Ressel, P.
Zettler, J.-T.
Hauptwerk
Society of Vacuum Coaters. 50th Annual Technical Conference 2007. Proceedings
Konferenz
Society of Vacuum Coaters (Annual Technical Conference) 2007
Language
English
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Fraunhofer-Institut für Photonische Mikrosysteme IPMS