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Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

In situ layer thickness measurement in OLED and sputter processes

 
: Uredat, S.; Trepk, T.; Eritt, M.; May, C.; Toerker, M.; Ressel, P.; Zettler, J.-T.

Society of Vacuum Coaters -SVC-, Albuquerque/NM:
Society of Vacuum Coaters. 50th Annual Technical Conference 2007. Proceedings : April 28 - May 3, 2007, Louisville, USA
Albuquerque: SVC, 2007
Society of Vacuum Coaters (Annual Technical Conference) <50, 2007, Louisville/KY>
English
Conference Paper
Fraunhofer IPMS ()

: http://publica.fraunhofer.de/documents/N-68686.html