• English
  • Deutsch
  • Log In
    Password Login
    Research Outputs
    Fundings & Projects
    Researchers
    Institutes
    Statistics
Repository logo
Fraunhofer-Gesellschaft
  1. Home
  2. Fraunhofer-Gesellschaft
  3. Konferenzschrift
  4. NIR hyperspectral imaging using MOEMS scanning grating chips and linear detector array
 
  • Details
  • Full
Options
2007
Conference Paper
Title

NIR hyperspectral imaging using MOEMS scanning grating chips and linear detector array

Abstract
"NIR Hyperspectral Imaging" is a universal tool to measure and control chemical properties of objects. The combination of digital imaging and molecular spectroscopy exhibits a great benefit, especially for in- and on-line analysis. However, a wide use is impeded at present due to the expensive and complex system approach. One reason is the high cost of two dimensional InGaAs detector arrays, another one is the special glass that is used in the near infrared NIR. In this paper a new approach for a NIR Imaging spectrometer is presented. The base of the new Pushbroom Hyperspectral Imager is a micromechanical scanning device with an integrated diffraction grating. This MOEMS device is made in a standard SOI fabrication process developed at Fraunhofer IPMS 1 2 3. For the Hyperspectral Imager, a new all-reflective optical system based on a Schiefspiegler setup has been developed. The simulated optical configuration and the achieved performance of the system will be presented.
Author(s)
Egloff, T.
Grüger, H.
Zimmer, F.
Schenk, H.
Scholles, M.
Lakner, H.
Mainwork
Next-Generation Spectroscopic Technologies  
Conference
Conference "Next-Generation Spectroscopic Technologies" 2007  
DOI
10.1117/12.734016
Language
English
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Keyword(s)
  • micro mechanical grating

  • hyperspectral imaging

  • imaging spectrometer

  • spectroscopy

  • scanning grating

  • micro scanning mirror

  • Cookie settings
  • Imprint
  • Privacy policy
  • Api
  • Contact
© 2024