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Integrated monitoring of ULK dielectrics out-gassing and measurement of pore sealing efficiency by residual gas analysis technique

 
: Delsol, R.; Chapelon, L.; Chaabouni, H.; Broussous, L.; Schellenberger, M.; Ostrovski, A.; Normandon, P.

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Travaly, Y.H.:
Materials for advanced metallization, MAM 2007 : The 16th European Workshop on "Materials for Advanced Metallization 2007", March 4 - 7, 2007, Brugge, Belgium
Amsterdam: Elsevier, 2007 (Microelectronic engineering 84.2007, Nr.11)
pp.2719-2722
European Workshop on Materials for Advanced Metallization (MAM) <16, 2007, Brugge>
English
Conference Paper, Journal Article
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-67748.html