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Thermal stability and gap-fill properties of spin-on MSQ low-k dielectrics
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2007
Conference Paper
Titel
Thermal stability and gap-fill properties of spin-on MSQ low-k dielectrics
Author(s)
Ahner, N.
Schulz, S.E.
Blaschta, F.
Rennau, M.
Hauptwerk
Materials for advanced metallization, MAM 2007
Konferenz
European Workshop on Materials for Advanced Metallization (MAM) 2007
DOI
10.1016/j.mee.2007.06.007
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM