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Electrostatic discharge failure analysis of capacitive RF MEMS switches

 
: Ruan, J.; Nolhier, N.; Bafleur, M.; Bary, L.; Coccetti, F.; Lisec, T.; Plana, R.

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Labat, N.:
18th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, ESREF 2007 : Will be held in Archachon from October 8th to October 12th, 2007
Orlando, Fla.: Elsevier, 2007 (Microelectronics reliability 47.2007, Nr.9/11)
pp.1818-1822
European Symposium on Reliability of Electron Devices, Failure Physics and Analysis (ESREF) <18, 2007, Archachon>
English
Conference Paper, Journal Article
Fraunhofer ISIT ()

: http://publica.fraunhofer.de/documents/N-67744.html