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Process technology, applications and potentials of magnetron sputtering technology for optical coatings

: Vergöhl, M.; Frach, P.; Bartzsch, H.; Pflug, A.; Rickers, C.

Kaiser, N. ; Optical Society of America -OSA-, Washington/D.C.; European Optical Society -EOS-; Society of Vacuum Coaters -SVC-, Albuquerque/NM:
Optical Interference Coatings 2007. CD-ROM : Topical Meeting and Tabletop Exhibit, Tucson, June 3-8, 2007. Technical digest
Washington, DC: OSA, 2007
ISBN: 1-55752-841-1
Optical Interference Coatings Topical Meeting and Tabletop Exhibit (OIC) <2007, Tucson/Ariz.>
Conference Paper
Fraunhofer IST ()

Different magnetron sputter geometries and modes for the deposition of optical coatings are presented. Examples of AR- and filter coatings are given demonstrating the high potential of this technology for different applications.