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Elektrochemische Mikrostrukturierung mit hoher Abtragsrate und hoher Abbildgenauigkeit

: Wünsch, D.

Chemnitz, 2007, 81 pp.
Chemnitz, TU, Dipl.-Arb., 2007
Fraunhofer IWU ()
Mikrostrukturierung; ECM; JET-ECM; elektrochemisches Abtragen; geschlossener Freistrahl; micromachining; electrochemical machining; high dissolution rate; high image precision

Miniaturized precision mechanical construction units and functional structures of the Micro System Technologies can be produced by the help of the electrochemical machining in difficult machinable metallic materials. The high potential of the innovative process JET-ECM for the fast production of high-precise three-dimensional microstructures was subject of this diploma thesis. In order to assess the process regard to high dissolution rates and high image precision, by experiments at an existing test station simple microstructures were produced and the parameters of the material removal were determined. Basic studies for the electrochemical machining of the metals copper, aluminium, chrome and an iron and/or a nickel-base alloy were progressed in sodium nitrate and sodium chloride. The results of the experimentally determined data and the three-dimensional examples show the borders and possibilities of the JET-ECM.