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InAs/GaSb type-II short-period superlattices for advanced single and dual-color focal plane arrays

Kurzperiodige InAs/GaSb Typ-II Übergitter für verbesserte Einfarben- und Zweifarben-Bildfeldmatrizen
: Walther, M.; Rehm, R.; Fleißner, J.; Schmitz, J.; Ziegler, J.; Cabanski, W.; Breiter, R.


Andresen, B.F. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Infrared technology and applications XXXIII : 9-13 April 2007, Orlando, Florida, USA
Bellingham, WA: SPIE, 2007 (SPIE Proceedings Series 6542)
ISBN: 978-0-8194-6664-8
Paper 654206
Conference on Infrared Technology and Applications <33, 2007, Orlando/Fla.>
Conference Paper
Fraunhofer IAF ()
IR-Detektor; IR detector; InAs/GaSb superlattice; InAs/GaSb Übergitter; focal plane array; Detektormatrize; FPA; dual-color; Zweifarben; missile warning sensor; Raketenwarnsensorik; bispectral; bispektral; missile approach warning

The fabrication and optimization of InAs/GaSb type-II superlattice (SL) detectors for single-color and dual-color focal plane arrays in the mid-wavelength infrared spectral range between 3-5 &mgr;m is reported. Single color focal plane arrays with 288 x 384 detector elements and 24 &mgr;m pitch have been fabricated with high pixel yield. Camera systems with InAs/GaSb SL detectors reveal NETD values of 27.9 mK at a cut-off wavelength of &lgr;c = 4.9 &mgr;m for an integration time of only 1 msec with F#/2.4 optics. A dual-color MWIR/MWIR InAs/GaSb SL camera, developed for missile approach warning systems, features simultaneous and spatially coincident detection for both spectral channels on each pixel. The camera system with 288 x 384 detector elements in 40 &mgr;m pitch shows excellent NETD values and high pixel operability. The fabrication of dual-color focal plane arrays on 3" GaSb substrates is presented.