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Antireflection of transparent polymers by advanced plasma etching procedures

 
: Schulz, U.; Munzert, P.; Leitel, R.; Wendling, I.; Kaiser, N.; Tünnermann, A.

:
Postprint (513 KByte; PDF; )

Optics Express 15 (2007), No.20, pp.13108-13113
ISSN: 1094-4087
English
Journal Article, Electronic Publication
Fraunhofer IOF ()
antireflection; microstructure fabrication; deposition and fabrication

Abstract
Self-organized nanostructures that provide antireflection properties grow on PMMA caused by plasma ion etching. A new procedure uses a thin initial layer prior to the etching step.
Different types of antireflective structures can now be produced in a shorter time and with fewer limitations on the type of polymer that can be used. The durability of the structured surfaces can be improved by the deposition of additional thin
films.

: http://publica.fraunhofer.de/documents/N-65538.html