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Flying wafer - A standardised methodology for multi-site processing Of 300 Mm wafers at research and development-sites

 
: Frickinger, J.; Öchsner, R.; Schellenberger, M.; Pfeffer, M.; Pfitzner, L.; Ryssel, H.; Claes, M.; Bearda, T.; Renaud, D.; Danel, A.; Lering, M.; Graef, M.; Kaushik, V.; Murphy, B.; Fritzsche, M.; Walther, H.; Hury, S.

Dolgui, A.; Morel, G. ; International Federation of Automatic Control -IFAC-; International Federation for Information Processing -IFIP-; International Federation of Operational Research Societies -IFORS-; Institute of Electrical and Electronics Engineers -IEEE-:
Information control problems in manufacturing. Proceedings volume from the 12th IFAC conference, INCOM 2006 : 17-19 May 2006, Saint-Etienne, France
Oxford: Elsevier, 2006 (Elsevier-IFAC publications)
ISBN: 0-08-044654-X
pp.59
Symposium on Information Control Problems in Manufacturing <12, 2006, Saint-Etienne>
English
Conference Paper
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-65268.html