Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

One megapixel SLM with high optical fill factor and low creep actuators

 
: Friedrichs, M.; Schmidt, J.; Duerr, P.; Bakke, T.

:

IEEE Lasers and Electro-Optics Society:
IEEE/LEOS International Conference on Optical MEMS and their Applications 2006. CD-ROM : 21 - 24 Aug. 2006, Big Sky, MT
Piscataway, NJ: IEEE, 2006
ISBN: 0-7803-9562-X
ISBN: 0-7803-9561-1
pp.23-24
International Conference on Optical MEMS and their Applications <2006, Big Sky/Mon.>
English
Conference Paper
Fraunhofer IPMS ()

: http://publica.fraunhofer.de/documents/N-65148.html